
✅ Ultra-Precise Direct-Drive Air Bearing Design
Ideal for angle calibration, eccentricity measurement, and transmittance testing of lenses, prisms, and optical components. The <0.8 µm runout and ±2 sec repeatability guarantee consistent, accurate results for optical inspection systems.
Used for multi-station inspection and processing of wafers, chips, and PCBs. The direct-drive, zero-backlash design and high-speed capability meet the efficiency and precision requirements of semiconductor production lines, while the air bearing avoids contamination risks from traditional bearings.
Suitable for indexing machining, profile inspection, and CMM applications for small precision parts. High axial/radial stiffness resists minor external forces during machining or measurement, ensuring workpiece positioning accuracy and improving product yield.
Perfect for high-precision rotation platforms in materials testing, physics experiments, and educational equipment. The compact form factor allows flexible experimental setups, and low air consumption adapts to laboratory air conditions, offering an optimal balance of performance and budget for research scenarios.
| Specification | Parameter |
| Model | E-EABT-D100 |
| Type | Direct-Drive Air Bearing Rotary Table |
| Motor Torque | 0.68 Nm (Rated) / 1.5 Nm (Peak) |
| Max Speed | 2000 rpm (Encoder Analog Mode) |
| Encoder Lines | 7872 line |
| Encoder Resolution | 0.82 sec (Optional 1 Vpp for higher resolution) |
| Repeat Positioning Accuracy | ≤ ±2 sec |
| Axial Max Load (5 bar) | 210 N |
| Radial Max Load (5 bar) | 78 N |
| Axial Max Stiffness (5 bar) | 102 N/µm |
| Radial Max Stiffness (5 bar) | 38 N/µm |
| Axial Max Runout* | < 0.8 µm |
| Radial Max Runout* | < 0.8 µm |
| Air Consumption | 8 NL/min |
| Tabletop Diameter | Ø100 mm |
| Overall Dimensions | 110 × 110 × 68 mm |
| Central Through-Hole | Ø20.00 mm |
| Mounting Holes | 6 × M4-6H, on Ø8.10 mm pitch circle |
| Operating Air Pressure | 5 bar (Standard) |