Specifcation | XY | θXθY | Z | θZ |
Travel | ±30mm | ±2.5deg | ±5mm | 360deg |
Motor type | linear motor | step motor | step motor | Direct drive motor |
Opticval Encode resolution | 4.88nm(1vpp) | 4.88nm(1vpp) | 4.88nm(1vpp) | 0.04sec |
Minimum step size | 100nm | 0.3sec | 100nm | 0.1sec |
Repeatability | ±0.2um | ±1sec | ±0.3um | ±1sec |
Positioning accuracy | ±1um | ±5sec | ±1um | ±5sec |
Maximum speed [mm/s] | 100mm/s | 30deg/sec | 15mm/s | 4rps |
Maximum load [kg] | The horizontal load is 10kg. Please contact the manufacturer for vertical load. | |||
Max mass | The whole weight is 12kg |